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Sigma SQC-122c - page 1
SQC-122c Thin Film Deposition Controller User’s Guide Version 2.0 © Copyright Sigma Instruments, Inc. 1999 - 2002 Sigma instruments ...
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Sigma SQC-122c - page 2
Safety Information Read this manual before installing, operating, or servicing equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. Safety Symbols W ARNING : Calls attention to a procedure, pr ...
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Sigma SQC-122c - page 3
Warranty Information This Sigma Instruments product is warranted against defects in material and workmanship for a period of 1 year from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective. ...
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Sigma SQC-122c - page 4
Table of Contents Chapter 1 Quick Start 1.0 Introduction ................................................................................................ 1-1 1.1 Thin Film Process Overview ........................................................................ 1-1 1.2 System Connections ............................................................. ...
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Sigma SQC-122c - page 5
Appendix A. Material Parameters B. Specifications C. I/O Connections D. Handheld Remote Controller E. Declaration of Conformity ...
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Sigma SQC-122c - page 6
Chapter 1 Quick Start 1- 1 1.0 Introduction The SQC-122c is a multi-channel quartz crystal monitor and deposition controller. It measures up to six 1MHz to 6 MHz quartz crystal sensors, and controls two evaporation sources. Twenty-five processes, consisting of 250 layers and 25 materials, can be stored for easy retrieval. Eight process control rela ...
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Sigma SQC-122c - page 7
Chapter 1 Quick Start 1- 2 1.2 Front Panel SoftKeys Control Knob Remote Jack Front Panel Controls SoftKeys Provide access to instrument operations and setup menus. The functions of the SoftKeys change to adapt to different operations and are displayed on the left of the screen. Control Knob Used to adjust values and select menu items. Pushing the c ...
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Sigma SQC-122c - page 8
Chapter 1 Quick Start 1- 3 1.3 Rear Panel 100-120/200-240 V~ 50/60 Hz 25 VA Sensor 1 Sensor 2 Output 1 Output 2 I/O 1-8 RS-232 Sensor 3 Sensor 4 Output 3 Output 4 instruments Sigma Manufactured By ? I/O 9-16 Fuse T.5A 250V SQC-122c Deposition Controller Serial No. Rear Panel Connections Sensor 1 & 2 Connects to quartz crystal sensor remote osci ...
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Sigma SQC-122c - page 9
Chapter 1 Quick Start 1- 4 1.4 System Connections Sensor Feedthrough In-Vac Cable 6" BNC Cable Oscillator Source Shutter Ground Wire Evaporation Supply Output Control Input BNC Cables This section identifies typical system components and their connection: System Components Sensor Holds the quartz crystal used to measure rate and thickness. Cry ...
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Sigma SQC-122c - page 10
Chapter 1 Quick Start 1- 5 1.5 Installation W ARNING : Care should be exercised to route SQC-122c cables as far as practical from other cables that carry high voltages or generate noise. This includes other line voltage cables, wires to heaters that are SCR-controlled, and cables to source power supplies that may conduct high transient currents dur ...
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Sigma SQC-122c - page 11
Chapter 1 Quick Start 1- 6 1.6 Process Setup Follow these steps to build a process from the main (also called “power up”) screen. Note: If you are prompted for a password, use the switches along the left of the screen to enter the password. The top switch is “1”, the bottom switch is “6”. If you forget the password, see the System Param ...
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Sigma SQC-122c - page 12
Chapter 1 Quick Start 1- 7 Edit Mode To edit a setting in any menu, turn the control knob to scroll to the desired setting, then press the Edit SoftKey. In Edit mode, the cursor moves to the setting value and the SoftKey functions change to show: Next: Store the parameter and move to next parameter for editing. Cancel: Stop editing and return the s ...
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Sigma SQC-122c - page 13
Chapter 1 Quick Start 1- 8 1.7 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Note: You can simulate the steps below, without actually depositing a film, by going to the System Parameters Menu and selecting Simulate Mode ON. Simulate mode is useful for testing processes before applying power to the ...
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Sigma SQC-122c - page 14
Chapter 1 Quick Start 1- 9 This page left blank for your notes. ...
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Sigma SQC-122c - page 15
Chapter 2 Operation 2- 1 2.0 Introduction This chapter describes common tasks associated with operating the SQC-122c. It assumes that you understand basic operation of the menus and parameter setup as described in Chapter 1. Detailed definitions of unfamiliar setup parameters can be found under the appropriate menu description in Chapter 3. 2.1 Def ...
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Sigma SQC-122c - page 16
Chapter 2 Operation 2- 2 The most commonly modified parameters are shown on the first film parameters screen. Additional parameters can be accessed by pressing Film Conds (film conditioning) or Deposit Controls. I Term Sensor 1 Sensor 2 Output Pocket Max Power Slew Rate Film Tooling Crystal Quality Disabled 100 10.0 76.0 1 Out1 On On 0.7 % % Out1/O ...
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Sigma SQC-122c - page 17
Chapter 2 Operation 2- 3 The PID parameters control the response of the SQC-122c to changes in deposition rate. These values are unique to each deposition chamber setup, and to a lesser extent to each material. The P Term is proportional (or gain), the % process rate change divided by the % input power change. The I Term (integral) sums the rate de ...
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Sigma SQC-122c - page 18
Chapter 2 Operation 2- 4 From the Film Conds menu, press Prev Menu to return to the main Film Params menu. Now press Deposit Controls . The Deposit Controls menu contains parameters that modify operation during the deposition phase. Capture Setting Error Rate Sampling Setting Accuracy Based Undefined (Cont,Time,Acc based) 18.0 Hold 20.0 % % RATE(A/ ...
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Sigma SQC-122c - page 19
Chapter 2 Operation 2- 5 2.3 Defining a Process A process is a sequence of film layers deposited to achieve a particular thin film characteristic. A few processes, each consisting of a few layers, may be adequate for a production facility. For research or laboratory use, the SQC-122c can store up to 25 processes to a total of 250 layers. You should ...
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Sigma SQC-122c - page 20
Chapter 2 Operation 2- 6 Initial Rate and Final Thickness are the main process setpoints for this layer of material. Keep in mind that the SQC-122c zeroes thickness at the beginning of each layer. It is not a cumulative value. Time Setpoint and Thickness Limit are arbitrary values that will activate a relay when they are reached. Start mode allows ...
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Sigma SQC-122c - page 21
Chapter 2 Operation 2- 7 2.4 Sensor Setup The theory of operation for a quartz crystal sensor is quite simple. The sensor initially oscillates at its natural frequency, typically 6MHz. As material is deposited on the substrate, it is also deposited on the sensor. Depending on the density of the deposited material, and the amount of material deposit ...
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Sigma SQC-122c - page 22
Chapter 2 Operation 2- 8 Sensor Tooling, also found in the System Params menu, adjusts for the difference in measured deposition rate between the sensor and the substrate being coated. Substrate Substrate Tooling Over 100% Tooling Under 100% In the illustration above (left), the sensor will measure less rate or thickness than is actually deposited ...
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Sigma SQC-122c - page 23
Chapter 2 Operation 2- 9 Once the sensor parameters are set, test your sensor setup to assure reliable readings at the SQC-122c. A typical single sensor setup is shown below: On the SQC-122c, press Next Menu until the Sensor Info option is shown, then press Sensor Info . Any connected sensor (whether programmed On or Off) should display its frequen ...
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Sigma SQC-122c - page 24
Chapter 2 Operation 2- 10 2.5 Source Setup The SQC-122c controls deposition rate by varying the control voltage to an external evaporation (source) supply. The previous illustration for sensor wiring also shows source supply wiring. The SQC-122c control voltage output range is set in the Systems Params menu. For the supply connected to Output 1, se ...
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Sigma SQC-122c - page 25
Chapter 2 Operation 2- 11 2.6 Running a Process Once a Process is defined with the desired Layers, and the sensors and source supply are properly connected, the deposition process is ready to run. The next section, on Loop Tuning, describes a method for initial process startup and optimization. This section describes the steps to select, start, and ...
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Sigma SQC-122c - page 26
Chapter 2 Operation 2- 12 While we’re on the Main Menu screen, and before starting the selected process, let’s cover the capabilities of the Next Menu screens. Press Next Menu once to view the first Next Menu screen. This screen provides two important operator functions: Zero Thickness and Auto/Manual mode. The Zero SoftKey can be used to zero ...
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Sigma SQC-122c - page 27
Chapter 2 Operation 2- 13 Enough preliminaries, let’s start the process! Press Start from any of the main screen menus to start deposition. If the first layer Start mode was programmed as Manual, you will need to press the Start Layer SoftKey now to start the layer. Note : Don’t confuse Manual and Auto Start mode with the Manual/Auto SoftKey. M ...
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Sigma SQC-122c - page 28
Chapter 2 Operation 2- 14 THICKNESS(kA) 0.824 RATE(A/s) 7.8 POWER( %) 55.3 Film : Film1 Layer : 1 of 4 Process : My Process 1 Layer Rate : 8.00 Final Thick : 1.100 Run Time : 0:01:45 PHASE: Stop Layer 100.0 50.0 0.0 0.0 80.0 160.0 Rate (A/s vs. Time) Next Menu Zero Auto / Manual Restart Layer Abort 40.0 120 Layer Stopped Start Nxt Layer Restart Lay ...
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Sigma SQC-122c - page 29
Chapter 2 Operation 2- 15 2.7 Loop Tuning This section will help you adjust your control loop PID parameters to achieve a stable deposition process. Keep in mind that there is no “best” way to determine PID parameters, and no one set of settings that are “best.” Setup System Parameters : Be sure that the output Scale and crystal Min/Max Fre ...
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Sigma SQC-122c - page 30
Chapter 2 Operation 2- 16 about 10% overshoot, lower the P Term. If the time to reach PWR DR is very slow, increase the P Term. A lower I Term will increase response time, a higher value will eliminate ringing and setpoint deviations. It is unlikely you will need any D Term. Continue to Start the process and adjust PID until steady-state response i ...
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Sigma SQC-122c - page 31
Chapter 2 Operation 2- 17 2.8 Troubleshooting Most SQC-122c problems are caused by defective crystals or improper film setup, particularly incorrect PID settings for the control loop. Follow the procedures below to identify and correct common problems. 2.8.1 No Readings, or Erratic Readings from Sensors : Disconnect the deposition source supply. Th ...
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Sigma SQC-122c - page 32
Chapter 2 Operation 2- 18 When the frequency reading is stable, reconnect the source supply. Start the deposition process in Manual mode with 0% output. The % Life readings should remain stable. Slowly raise the % Output until a rate reading is displayed above the graph. As material is deposited on the crystal, the % Life reading should remain stab ...
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Sigma SQC-122c - page 33
Chapter 2 Operation 2- 19 This page left blank for your notes. ...
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Sigma SQC-122c - page 34
Chapter 3 Menus 3- 1 3.0 Introduction SQC-122c operation during deposition is accomplished by pressing one of the six SoftKeys along the left of the display. Five menus provide access to all programmable and operating functions: Main Menu The Main Menu is displayed at power up. It provides the SoftKey functions and display information necessary to ...
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Sigma SQC-122c - page 35
Chapter 3 Menus 3- 2 3.1 Main Menu The default, power-up Main Screen display is shown below. THICKNESS(kA) 0.000 RATE(A/s) 0.0 POWER( %) 0.0 Film : Aluminum Layer : 1 of 25 Process : My Process 1 Layer Rate : 11.1 Final Thick : 0.1011 Run Time : 0:00:00 PHASE: Stopped 100.0 50.0 0.0 0.0 25.0 50.0 Power ( % vs. Time) Next Menu Quick Setup Process Me ...
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Sigma SQC-122c - page 36
Chapter 3 Menus 3- 3 The Main Screen SoftKeys undergo subtle changes based on the current process status. The table below describes the function of each of the possible SoftKeys on the Main Screen. Next Menu Displays additional Main Menu options as described in Section 3.2. Quick Setup Displays the Quick Setup Menu of commonly changed process value ...
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Sigma SQC-122c - page 37
Chapter 3 Menus 3- 4 3.2 Next Menu Screens The Next Menu SoftKey provides access to two sub-menus of the Main Menu that control display and operating mode preferences. Next Menu Screens Zero Zeros the thickness reading. Useful for resetting or extending the current deposition layer. Auto / Manual Toggles between Auto and Manual power control. When ...
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Sigma SQC-122c - page 38
Chapter 3 Menus 3- 5 3.3 Quick Setup Menu The Quick Setup Menu provides access to the most commonly adjusted parameters for the current process and layer. Exit to Main Returns to the Main Menu. Edit Selects the highlighted parameter for edit. SoftKey functions change to: Next: Store parameter and move to next for editing. Cancel: Stop editing and u ...
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Sigma SQC-122c - page 39
Chapter 3 Menus 3- 6 Quick Setup parameters are described below: Initial Rate : The beginning rate of deposition for this layer. Final Thickness : The desired final thickness of this layer. The deposition phase of this layer will end when this thickness is reached. P Term : Sets the gain of the control loop. High gains yield more responsive (but po ...
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Sigma SQC-122c - page 40
Chapter 3 Menus 3- 7 3.4 Process Menus There are several tiers of Process Menus. The first menu (shown below) selects the current process. The current process is the process that is ready to run, and also the process that is selected for editing. Main Screen Returns to the Main Menu. Prev Menu Steps back through the sequence of process menus: Proce ...
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Sigma SQC-122c - page 41
Chapter 3 Menus 3- 8 The second Process Menu shows the sequence of layers that will be deposited in the current process. Main Screen Returns to the Main Menu. Prev Menu Returns to the Process Select Menu. Edit Displays the Layer Edit Menu for the highlighted layer (see next page). Cut / Paste Used to develop the sequence of layers in a process. The ...
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Sigma SQC-122c - page 42
Chapter 3 Menus 3- 9 Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that are desired for this layer. The Layer Edit Menu provides access to these layer parameters: Fnl Thk Thickness Limit Start Mode Ramp 1 Start Thkness Ramp Time New Rate Ramp 2 Disabled 99.0 0:10:00 4.500 Enabled Manual 0.000 9.000 En/Dis A ...
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Sigma SQC-122c - page 43
Chapter 3 Menus 3- 10 A description of each parameter on the Layer Edit Menu follows: Initial Rate : The beginning rate of deposition for this layer. Final Thickness : The desired final thickness of this layer. The deposition phase of this layer will end when this thickness is reached. Time Setpoint : Sets an arbitrary time, after deposition begins ...
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Sigma SQC-122c - page 44
Chapter 3 Menus 3- 11 3.5 Film Menus Each film has certain characteristics that determine how it should be deposited. The Film Menus allow you to set parameters that regulate the deposition of each film in a certain process. My Process 1 Editing: Scroll Films with Knob 11. Film 11 Film Select Menu Main Screen Prev Menu Edit Delete THICKNESS(kA) 0.0 ...
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Sigma SQC-122c - page 45
Chapter 3 Menus 3- 12 The material to be deposited is the most significant film parameter. However, a film definition also includes the setup parameters shown below: I Term Sensor 1 Sensor 2 Output Pocket Max Power Slew Rate Crystal Quality Disabled 10.0 76.0 1 Out1 On On 0.7 % % Out1/Out2 On/Off On/Off Sec. RATE(A/s) 0.0 Film Edit Menu Film Conds. ...
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Sigma SQC-122c - page 46
Chapter 3 Menus 3- 13 The Film Conds SoftKey displays these additional film conditioning settings: (Refer to section 2.2 for definitions). Exit to Main Returns to the Main Menu. Prev Menu Returns to the Film Edit Menu. Edit Selects the highlighted parameter for edit. SoftKey functions change to: Next: Store parameter and move to next for editing. C ...
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Sigma SQC-122c - page 47
Chapter 3 Menus 3- 14 The Deposit Controls SoftKey displays these additional film settings: (Refer to section 2.2 for deposition control definitions.) Exit to Main Returns to the Main Menu. Prev Menu Returns to the Film Edit Menu. Edit Selects the highlighted parameter for edit. SoftKey functions change to: Next: Store parameter and move to next fo ...
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Sigma SQC-122c - page 48
Chapter 3 Menus 3- 15 A description of each film parameter follows: P Term : The proportional term sets the gain of the control loop. High gains yield more responsive (but potentially unstable) loops. Try a value of 50, then gradually increase/decrease the value to respond to step changes in rate setpoint. I Term : The integral term controls the ti ...
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Sigma SQC-122c - page 49
Chapter 3 Menus 3- 16 0 Disabled 5 12.5% 1 30.0% 6 10.0% 2 25.0% 7 7.5% 3 20.0% 8 5.0% 4 15.0% 9 2.5% Note : The Crystal Quality setting is very sensitive to PID loop tuning. It is best to leave Crystal Quality disabled until you are confident of your process and PID settings. Crystal Stability : As material is deposited on the crystal, the frequen ...
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Sigma SQC-122c - page 50
Chapter 3 Menus 3- 17 Feed : The feed phase holds output power at the level and time required to wire feed new material. Idle : Idle power ramps output power back to zero, or holds the material at a state that is ready for deposition (usually the same as Ramp 2 power). Shutter Delay : It is often desirable to obtain deposition control before the su ...
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Sigma SQC-122c - page 51
Chapter 3 Menus 3- 18 3.6 System Parameters Menu The System Parameters Menu contains settings that affect the basic operation of the SQC-122c. System parameters generally pertain to the physical setup of your vacuum system equipment. System Tooling Xtal Tool 2 Simulate Mode Min Frequency Max Frequency Scale 1 Scale 2 Contrast Dev Graph Limit 20.0 1 ...
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Sigma SQC-122c - page 52
Chapter 3 Menus 3- 19 Descriptions of each System Parameter follows: Period : Sets the measurement period between .1 second (10 readings per second) and 1 second. A longer period gives higher reading accuracy, especially in low rate and low density applications. Period Frequency ( seconds) Resolution (Hz) .1 .3 .25 .12 .5 .06 .75 .04 1 .03 System T ...
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Sigma SQC-122c - page 53
Chapter 3 Menus 3- 20 Rate Alarm Low : Sets the % deviation below rate setpoint that causes an audible alarm. Rate Alarm High : Sets the % deviation above rate setpoint that causes an audible alarm. The tone of the high rate alarm is lower than that of the low rate alarm. Password Enable : If Password is enabled, the Quick Start, Film and System Me ...
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Sigma SQC-122c - page 54
Chapter 3 Menus 3- 21 3.7 I/O Setup The I / O Setup SoftKey displays a menu allowing you to map the eight digital inputs and the eight digital outputs. I / O Mapping Menu Parameter My Process 1 -> Layer 1 -> Aluminum Edit Prev Menu Exit to Main Input 1 THICKNESS(kA) 0.000 POWER( %) 0.0 RATE(A/s) 0.0 Value None Input 2 None Input 3 None Input ...
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Sigma SQC-122c - page 55
Chapter 3 Menus 3- 22 In the I/O Setup Menu, any number of “events” can be mapped to the eight digital inputs and eight relay outputs. Options are set by selecting a relay or input and then turning the control knob to select the desired setting. The following explains each event: Relays Explanation (closes when) Source 1 Shutter Deposit phase f ...
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Sigma SQC-122c - page 56
Chapter 3 Menus 3- 23 This page left blank for your notes. ...
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Sigma SQC-122c - page 57
Chapter 4 Option s 4- 1 4.0 Introduction This section covers the installation of optional accessories. 4.1 Option Card No option cards are available for the SQC-122c, although the rear panel has locations for an expansion card. To expand the SQC-122c, the unit can be upgraded to an SQC-222. Contact Sigma for information on this factory-only upgrade ...
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Sigma SQC-122c - page 58
Appendix A. Material Parameters Material Density ZFactor Material Density ZFactor Aluminum 2.73 1.08 Magnesium Fluoride 3 1 Aluminum Oxide 3.97 1 Manganese 7.2 0.377 Antimony 6.62 0.768 Manganese Sulfide 3.99 0.94 Arsenic 5.73 0.966 Mercury 13.46 0.74 Barium 3.5 2.1 Molybdenum 10.2 0.257 Beryllium 1.85 0.543 Neodymium Fluoride 6.506 1 Bismuth 9.8 0 ...
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Sigma SQC-122c - page 59
Appendix B. Specifications Measurement Number of Sensors Frequency Range Frequency Accuracy Frequency Resolution Rate Accuracy Rate Resolution Thickness Accuracy Thickness Resolution Measurement Period 2 4.0 MHz to 6.0 MHz .01% @ 2 readings/sec. .06 Hz @ 2 readings/sec .5% typical .01/.1 ? /s .5% typical 1 ? .1 to 1 sec. Source Number of Sources Co ...
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Sigma SQC-122c - page 60
Appendix Display Graphs Rate, Deviation, Power Readouts Thickness, Rate, Power Process Parameters (a Process is a sequence of layers) # Processes 25 # Films 25 # Layers (total all processes) 250 Layer Parameters (Layer is a Film, plus these values) Initial Rate 0.0 to 999.9 ? /sec. Final Thickness 0.0 to 999.9 ? Time Setpoint 0 to 30000 sec. Thickn ...
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Sigma SQC-122c - page 61
Appendix C. I/ O Connections A 25 pin D-sub connector, located on the rear of the SQC-122c, provides Input/ Output connections. Refer to Section 3.6 for relay and input functional assignments. Inputs can be activated either by connecting to a switch and shorting to Ground, or they can be driven by a TTL compatible signal. W ARNING : These are not i ...
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Sigma SQC-122c - page 62
Appendix A Y adapter cable can be used to provide compatibility with older (non color) models of the SQC-122, as shown below. Contact Sigma for information on purchasing this adapter, or other custom I/O cables. ...
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Sigma SQC-122c - page 63
Appendix D. Handheld Remote Controller The Handheld Controller provides the capability of adjusting output power remotely when the SQC-122c is in Manual Mode. ABORT Sigma instruments ? Handheld Controller To use the handheld controller, attach the cable from the handheld controller to the Remote jack on the SQC-122c front panel. Select a Process us ...
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Sigma SQC-122c - page 64
Appendix E. EC Declaration of Conformity Manufacturer’s Name: Sigma Instruments Manufacturer’s Address: 1318 Duff Drive Fort Collins, CO 80524 USA declares that the product: Product Name: Deposition Rate Controller Product Model: SQC-122c Product Options: All Options conforms to the following Directives: 73/23/EEC (93/68/EEC) Low Voltage Direct ...
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